MEMS Fundamentals with ANSYS simulation of basic sensors and actuators

Michał Szermer, Andrzej Napieralski (Eds.)

The purpose of this book is to help universities and individuals extend their traditional microelectronics education into the MEMS area. It is organized in a set of tutorials primarily aimed at electronic engineering students and practicing engineers. Based on carefully selected examples of sensors and actuators, it introduces the reader to device operating principles, modeling approaches, simulation tools and design methodologies.